Institute of Electrical Engineering,Chinese Academy of Sciences
Research Divisions

Micro-nano Fabrication Technology Department

The department mainly studies fabrication technology in micro and nano scale, developing the technology with independent intellectual property rights, providing the strategic technological base for the research and development of the ultra-precise equipment in China, and probing the application of micro-nano fabrication technology in micro electromechanical system and life science instrument. The main research areas cover nano electron-beam lithography, micro electromechanical system, life science instruments and scanning probe microscope.